发明申请
US20080286943A1 Motherboard Cutting Method, Motherboard Scribing Apparatus, Program and Recording Medium
审中-公开
主板切割方法,主板划线设备,程序和记录介质
- 专利标题: Motherboard Cutting Method, Motherboard Scribing Apparatus, Program and Recording Medium
- 专利标题(中): 主板切割方法,主板划线设备,程序和记录介质
-
申请号: US11569333申请日: 2005-05-19
-
公开(公告)号: US20080286943A1公开(公告)日: 2008-11-20
- 发明人: Yoshitaka Nishio
- 申请人: Yoshitaka Nishio
- 申请人地址: JP Osaka
- 专利权人: MITSUBOSHI DIAMOND INDUSTRIAL CO., LTD.
- 当前专利权人: MITSUBOSHI DIAMOND INDUSTRIAL CO., LTD.
- 当前专利权人地址: JP Osaka
- 优先权: JP2004-149948 20040520
- 国际申请: PCT/JP2005/009197 WO 20050519
- 主分类号: H01L21/78
- IPC分类号: H01L21/78 ; B26D3/00
摘要:
A mother substrate cutting method for cutting a plurality of unit substrates out of a mother substrate, comprises the steps of: (a) forming scribe lines on the mother substrate by scribe forming means; and (b) breaking the mother substrate along the scribe lines, wherein the step (a) includes a step of forming a first scribe line for cutting a first unit substrate out of the mother substrate and a second scribe line for cutting a second unit substrate out of the mother substrate by moving a pressure position to the mother substrate without a pressure to the mother substrate by the scribe forming means being interrupted.
信息查询
IPC分类: