发明申请
- 专利标题: Ultra-Low Dielectrics Film for Copper Interconnect
- 专利标题(中): 用于铜互连的超低介电膜
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申请号: US10581165申请日: 2004-05-12
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公开(公告)号: US20080287573A1公开(公告)日: 2008-11-20
- 发明人: Hee-Woo Rhee , Do Young Yoon , Kook Heon Char , Jin-Kyu Lee , Bongjin Moon , Sung-Kyu Min , Se Jung Park , Jae-Jin Shin
- 申请人: Hee-Woo Rhee , Do Young Yoon , Kook Heon Char , Jin-Kyu Lee , Bongjin Moon , Sung-Kyu Min , Se Jung Park , Jae-Jin Shin
- 优先权: KR10-2003-0086244 20031201
- 国际申请: PCT/KR04/01092 WO 20040512
- 主分类号: C08K5/1545
- IPC分类号: C08K5/1545
摘要:
The present invention relates to an ultra-low dielectric film for a copper interconnect, in particular, to an porous film prepared in such a manner that coating with an organic solution containing a polyalkyl silsesquioxane precursor or its copolymer as a matrix and acetylcyclodextrin nanoparticles as a template and then performing a sol-gel reaction and heat treatment at higher temperature. The present films may contain the template of up to 60 vol %, due to the use of acetylcyclodextrin, and have homogeneously distributed pores with the size of no more than 5 nm in the matrix. In addition, the present films exhibit a relatively low dielectric constant of about 1.5, and excellent interconnectivity between pores, so that they are considered a promising ultra-low dielectric film for a copper interconnect.
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