发明申请
US20080289568A1 QUARTZ GLASS CRUCIBLE, PROCESS FOR PRODUCING THE SAME, AND USE
审中-公开
QUARTZ玻璃可溶,其生产方法和使用
- 专利标题: QUARTZ GLASS CRUCIBLE, PROCESS FOR PRODUCING THE SAME, AND USE
- 专利标题(中): QUARTZ玻璃可溶,其生产方法和使用
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申请号: US12129112申请日: 2008-05-29
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公开(公告)号: US20080289568A1公开(公告)日: 2008-11-27
- 发明人: Minoru Kanda , Masaru Sato
- 申请人: Minoru Kanda , Masaru Sato
- 申请人地址: JP Akita-city
- 专利权人: JAPAN SUPER QUARTZ CORPORATION
- 当前专利权人: JAPAN SUPER QUARTZ CORPORATION
- 当前专利权人地址: JP Akita-city
- 优先权: JP2005-344172 20051129
- 主分类号: C30B15/10
- IPC分类号: C30B15/10 ; C03B19/09
摘要:
A crucible has a structure where a layer containing a crystallization accelerating component such as aluminum or the like (a crystallization accelerating layer) is inserted inside a quartz glass layer of a crucible straight body part excepting a crucible bottom part. The crucible does not deform and fall inwardly at the straight body part since a part containing a crystallization accelerating component advances to crystallize so as to increase strength at a high temperature when the crucible is used in pulling up silicon single crystal. Therefore, a single crystallization rate can be increased. Further, since the crystallization accelerating layer is inserted inside the quartz glass layer, the crystallization accelerating component, such as aluminum or barium, does not contact with silicon melt or a carbon susceptor, contamination by eluting these metals does not occurs. Further, since the crystallization accelerating layer is not provided at the crucible bottom part, there is no danger to crack due to thermal distortion at a time of pulling up silicon single crystal and melt leakage does not occur.
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