发明申请
- 专利标题: Gallium Nitride Semiconductor and Method of Manufacturing the Same
- 专利标题(中): 氮化镓半导体及其制造方法
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申请号: US12124080申请日: 2008-05-20
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公开(公告)号: US20080290347A1公开(公告)日: 2008-11-27
- 发明人: Yong Jin Kim , Dong Kun Lee
- 申请人: Yong Jin Kim , Dong Kun Lee
- 优先权: KR10-2004-0105371 20041214
- 主分类号: H01L29/20
- IPC分类号: H01L29/20
摘要:
The present invention provides to a gallium nitride (GaN) semiconductor and a method of manufacturing the same, capable of reducing crystal defects caused by a difference in lattice parameters, and minimizing internal residual stress. In particular, since a high-quality GaN thin film is formed on a silicon wafer, manufacturing costs can be reduced by securing high-quality wafers with a large diameter at a low price, and applicability to a variety of devices and circuit can also be improved.
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