发明申请
- 专利标题： Method of forming catalyst nanoparticles for nanowire growth and other applications
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申请号： US12150063申请日： 2008-04-23
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公开(公告)号： US20080296785A1公开(公告)日： 2008-12-04
- 发明人: Theodore I. Kamins , Philip J. Kuekes , Yong Chen
- 申请人： Theodore I. Kamins , Philip J. Kuekes , Yong Chen
- 主分类号： H01L23/48
- IPC分类号： H01L23/48
摘要：
Methods for forming a predetermined pattern of catalytic regions having nanoscale dimensions are provided for use in the growth of nanowires. The methods include one or more nanoimprinting steps to produce arrays of catalytic nanoislands or nanoscale regions of catalytic material circumscribed by noncatalytic material.
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