发明申请
- 专利标题: POLISHING PAD, THE USE THEREOF AND THE METHOD FOR MANUFACTURING THE SAME
- 专利标题(中): 抛光垫,其使用方法及其制造方法
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申请号: US11754418申请日: 2007-05-29
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公开(公告)号: US20080299879A1公开(公告)日: 2008-12-04
- 发明人: Chung-Chih Feng , I-Peng Yao , Lyang-Gung Wang , Yung-Chang Hung , Kun-Cheng Sung
- 申请人: Chung-Chih Feng , I-Peng Yao , Lyang-Gung Wang , Yung-Chang Hung , Kun-Cheng Sung
- 申请人地址: TW Kaohsiung
- 专利权人: SAN FANG CHEMICAL INDUSTRY CO., LTD.
- 当前专利权人: SAN FANG CHEMICAL INDUSTRY CO., LTD.
- 当前专利权人地址: TW Kaohsiung
- 主分类号: B24B29/00
- IPC分类号: B24B29/00 ; B24B7/00 ; B24D11/00
摘要:
The present invention mainly relates to a polishing pad comprising a base material comprising fibers; a membrane with low permeability; a two-component paste formed on the upper surface of the membrane with low permeability for adhering the base material to the membrane with low permeability; and a polyurethane paste formed on the lower surface of the membrane with low permeability. A method of polishing a substrate comprising using the polishing pad and a method for manufacturing the polishing pad as described above are also provided. The polishing pad as mentioned above prevents the polishing pad from detaching from the polishing platen or head. The polishing pad is easy to be replaced without leaving residues on the polishing platen or head.
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