发明申请
US20080303022A1 Optical sensor element, optical sensor device and image display device using optical sensor element
审中-公开
光学传感器元件,光学传感器元件和使用光学传感器元件的图像显示装置
- 专利标题: Optical sensor element, optical sensor device and image display device using optical sensor element
- 专利标题(中): 光学传感器元件,光学传感器元件和使用光学传感器元件的图像显示装置
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申请号: US12071704申请日: 2008-02-25
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公开(公告)号: US20080303022A1公开(公告)日: 2008-12-11
- 发明人: Mitsuharu Tai , Masayoshi Kinoshita
- 申请人: Mitsuharu Tai , Masayoshi Kinoshita
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 优先权: JPJP2007-153490 20070611
- 主分类号: H01L31/0376
- IPC分类号: H01L31/0376
摘要:
A highly sensitive optical sensor element, and a switch element such as a sensor driver circuit are formed on the same insulating substrate by using an LTPS planar process to provide a low cost area sensor (optical sensor device) incorporating the sensor driver circuit and the like or an image display device incorporating the optical sensor element. As an optical sensor element structure, one electrode of the sensor element is manufactured with the same film of the polycrystalline silicon film that is an active layer of the switch element constituting a circuit. A photoelectric conversion unit for performing photoelectric conversion is made of an amorphous silicon or a polycrystalline silicon film of an intrinsic layer. A structure in which the amorphous silicon of the photoelectric conversion unit and the insulating layer are sandwiched between two electrodes of the sensor element is adopted.
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