发明申请
- 专利标题: SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
- 专利标题(中): 半导体器件及其制造方法
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申请号: US12135355申请日: 2008-06-09
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公开(公告)号: US20080303136A1公开(公告)日: 2008-12-11
- 发明人: Kentaro Mori , Shintaro Yamamichi , Hideya Murai , Takuo Funaya , Masaya Kawano , Takehiko Maeda , Kouji Soejima
- 申请人: Kentaro Mori , Shintaro Yamamichi , Hideya Murai , Takuo Funaya , Masaya Kawano , Takehiko Maeda , Kouji Soejima
- 申请人地址: JP Tokyo JP Kawasaki
- 专利权人: NEC CORPORATION,NEC ELECTRONICS CORPORATION
- 当前专利权人: NEC CORPORATION,NEC ELECTRONICS CORPORATION
- 当前专利权人地址: JP Tokyo JP Kawasaki
- 优先权: JP2007-153293 20070608
- 主分类号: H01L23/15
- IPC分类号: H01L23/15 ; H01L21/58
摘要:
A transparent board is positioned on a support board provided with a positioning mark, and a release material is provided. A semiconductor element is then positioned so that the electrode element faces upward, and the support board is then removed. An insulating resin is then formed on the release material so as to cover the semiconductor element; and a via, a wiring layer, an insulation layer, an external terminal, and a solder resist are then formed. The transparent board is then peeled from the semiconductor device through the use of the release material. A chip can thereby be mounted with high precision, there is no need to provide a positioning mark during mounting of the chip on the substrate in the manufacturing process, and the substrate can easily be removed. As a result, a semiconductor device having high density and a thin profile can be manufactured at low cost.
公开/授权文献
- US08035217B2 Semiconductor device and method for manufacturing same 公开/授权日:2011-10-11
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