发明申请
US20080305729A1 THIN POLISHING PAD WITH WINDOW AND MOLDING PROCESS 有权
具有窗口和成型工艺的薄型抛光垫

THIN POLISHING PAD WITH WINDOW AND MOLDING PROCESS
摘要:
A polishing pad is described that has a polishing layer with a polishing surface, an adhesive layer on a side of the polishing layer opposite the polishing layer, and a solid light-transmitting window extending through and molded to the polishing layer. The window has a top surface coplanar with the polishing surface and a bottom surface coplanar with a lower surface of the adhesive layer. A method of making a polishing pad includes forming an aperture through a polishing layer and an adhesive layer, securing a backing piece to the adhesive layer on a side opposite a polishing surface of the polishing layer, dispensing a liquid polymer into the aperture, and curing the liquid polymer to form a window.
公开/授权文献
信息查询
0/0