发明申请
US20080307620A1 Thin-film capacitor, laminated structure and methods of manufacturing the same 审中-公开
薄膜电容器,层压结构及其制造方法

Thin-film capacitor, laminated structure and methods of manufacturing the same
摘要:
Disclosed are an embedded capacitor and a printed circuit board including the same that can minimize the oxidization of a metal layer. A thin-film capacitor can include a first metal electrode film; a barrier layer, formed on the first metal electrode film to include a conductive oxide; a dielectric film, formed on the barrier layer; and a second metal electrode film, formed on the dielectric film. With the present invention, the outstanding characteristic of a ferroelectric thin film can be provided by minimizing the oxidization of a copper film in the heat treatment after forming the ferroelectric thin film on the copper film.
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