发明申请
- 专利标题: MULTI-FUNCTION MODULE FOR AN ELECTRON BEAM COLUMN
- 专利标题(中): 电子束柱的多功能模块
-
申请号: US12194220申请日: 2008-08-19
-
公开(公告)号: US20080308751A1公开(公告)日: 2008-12-18
- 发明人: Benyamin Buller , William J. DeVore , Juergen Frosien , Xinrong Jiang , Richard L. Lozes , Henry Thomas Pearce-Percy , Dieter Winkler , Steven T. Coyle , Helmut Banzhof
- 申请人: Benyamin Buller , William J. DeVore , Juergen Frosien , Xinrong Jiang , Richard L. Lozes , Henry Thomas Pearce-Percy , Dieter Winkler , Steven T. Coyle , Helmut Banzhof
- 专利权人: JEOL, Inc.
- 当前专利权人: JEOL, Inc.
- 主分类号: A61N5/00
- IPC分类号: A61N5/00
摘要:
A multifunction module for an electron beam column comprises upper and lower electrodes, and a central ring electrode. The upper and lower electrodes have multipoles and are capable of deflecting, or correcting an aberration of, an electron beam passing through the electrodes. A voltage can be applied to the central ring electrode independently of the voltages applied to the upper and lower electrodes to focus the electron beam on a substrate.
公开/授权文献
- US07800075B2 Multi-function module for an electron beam column 公开/授权日:2010-09-21