发明申请
- 专利标题: POLISHING PAD AND PRODUCTION METHOD THEREOF
- 专利标题(中): 抛光垫及其生产方法
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申请号: US12197643申请日: 2008-08-25
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公开(公告)号: US20080313967A1公开(公告)日: 2008-12-25
- 发明人: Fujio SAKURAI , Iwao Mihara , Yoshinori Igarashi , Kou Hasegawa
- 申请人: Fujio SAKURAI , Iwao Mihara , Yoshinori Igarashi , Kou Hasegawa
- 申请人地址: JP Tokyo
- 专利权人: JSR CORPORATION
- 当前专利权人: JSR CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2003-110853 20030415
- 主分类号: C08J5/14
- IPC分类号: C08J5/14
摘要:
There are provided a polishing pad which exhibits excellent polishing stability and excellent slurry retainability during polishing and even after dressing, can prevent a reduction in polishing rate effectively and is also excellent in an ability to flatten an substrate to be polished, and a method for producing the polishing pad. The method comprises dispersing water-soluble particles such as β-cyclodextrin into a crosslinking agent such as a polypropylene glycol so as to obtain a dispersion, mixing the dispersion with a polyisocyanate such as 4,4′-diphenylmethane diisocyanate and/or an isocyanate terminated urethane prepolymer, and reacting the mixed solution so as to obtain a polishing pad having the water-soluble particles dispersed in the matrix.
公开/授权文献
- US07922783B2 Polishing pad and production method thereof 公开/授权日:2011-04-12
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