发明申请
- 专利标题: TEMPERATURE CONTROL DEVICE
- 专利标题(中): 温度控制装置
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申请号: US12110225申请日: 2008-04-25
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公开(公告)号: US20080314564A1公开(公告)日: 2008-12-25
- 发明人: Kazuya NAGASEKI , Yoshiyuki KOBAYASHI , Koichi MURAKAMI , Ryo NONAKA , Yoshihisa SUDOH , Hiroshi ITAFUJI , Norio KOKUBO
- 申请人: Kazuya NAGASEKI , Yoshiyuki KOBAYASHI , Koichi MURAKAMI , Ryo NONAKA , Yoshihisa SUDOH , Hiroshi ITAFUJI , Norio KOKUBO
- 申请人地址: JP Tokyo JP Komaki-shi
- 专利权人: TOKYO ELECTRON LIMITED,CKD CORPORATION
- 当前专利权人: TOKYO ELECTRON LIMITED,CKD CORPORATION
- 当前专利权人地址: JP Tokyo JP Komaki-shi
- 优先权: JP2007-118071 20070427
- 主分类号: F28D15/00
- IPC分类号: F28D15/00
摘要:
A temperature control device controls the temperature of a controlled object by circulating a fluid in a temperature adjustment unit arranged near the controlled object. The temperature control device comprises a heating pathway that heats and circulates the fluid in the temperature adjustment unit, a cooling pathway that cools and circulates the fluid in the temperature adjustment unit, a bypass pathway that does not pass the fluid through the heating pathway and cooling pathway, but circulates the fluid in the temperature adjustment unit, and adjustment means that adjust a flow ratio of the fluid that is supplied from the heating pathway, cooling pathway, and bypass pathway to the temperature adjustment unit via a confluence unit that combines these flows. The adjustment means are provided on a downstream side of each of the heating pathway, the cooling pathway, and the bypass pathway and on the upstream side of the confluence unit.
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