发明申请
US20080315204A1 Thin Film Transistor, and Active Matrix Substrate and Display Device Provided with Such Thin Film Transistor 审中-公开
薄膜晶体管,以及提供这种薄膜晶体管的有源矩阵基板和显示装置

  • 专利标题: Thin Film Transistor, and Active Matrix Substrate and Display Device Provided with Such Thin Film Transistor
  • 专利标题(中): 薄膜晶体管,以及提供这种薄膜晶体管的有源矩阵基板和显示装置
  • 申请号: US12162629
    申请日: 2007-01-23
  • 公开(公告)号: US20080315204A1
    公开(公告)日: 2008-12-25
  • 发明人: Yoshihiro OkadaWataru NakamuraAtsushi Ban
  • 申请人: Yoshihiro OkadaWataru NakamuraAtsushi Ban
  • 优先权: JP2006-020600 20060130
  • 国际申请: PCT/JP2007/050973 WO 20070123
  • 主分类号: H01L27/12
  • IPC分类号: H01L27/12 H01L29/04
Thin Film Transistor, and Active Matrix Substrate and Display Device Provided with Such Thin Film Transistor
摘要:
Improves the electric current driving capability of a thin film transistor without the yield being decreased due to a defective leak between a source electrode/drain electrode and a gate electrode or due to a decrease in an off-characteristic.A thin film transistor according to the present invention includes a gate electrode; an insulating film covering the gate electrode; a semiconductor layer provided on the insulating film; and a source electrode and a drain electrode provided on the insulating film and the semiconductor layer. The insulating film is a multiple layer insulating film including a first insulating layer and a second insulating layer provided on the first insulating layer. The multiple layer insulating film has a low stacking region excluding the first insulating layer and a high stacking region in which the first insulating layer and the second insulating layer are stacked. The first insulating layer is provided so as to cover at least an edge of the gate electrode. The semiconductor layer is provided on both the low stacking region and the high stacking region of the multiple layer insulating film. The semiconductor layer and the low stacking region are arranged such that a path of a current flowing between the source electrode and the drain electrode necessarily passes a part of the semiconductor layer which is located above the low stacking region.
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