发明申请
US20080315353A1 EMPTY VIAS FOR ELECTROMIGRATION DURING ELECTRONIC-FUSE RE-PROGRAMMING 有权
在电子保险丝重新编程过程中电气的空白

EMPTY VIAS FOR ELECTROMIGRATION DURING ELECTRONIC-FUSE RE-PROGRAMMING
摘要:
The disclosure relates generally to integrated circuit (IC) chip fabrication, and more particularly, to an e-fuse device including an opening, a first via and a second via in an interlayer dielectric, wherein the opening, the first via and the second via are connected to an interconnect below the interlayer dielectric; a dielectric layer that encloses the first via and the second via; and a metal layer over the dielectric layer, wherein the metal layer fills the opening with a metal, and wherein the first via and the second via are substantially empty to allow for electromigration of the interconnect during re-programming of the e-fuse device.
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