发明申请
- 专利标题: Methods of testing and manufacturing optical elements
- 专利标题(中): 测试和制造光学元件的方法
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申请号: US12216106申请日: 2008-06-30
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公开(公告)号: US20080316500A1公开(公告)日: 2008-12-25
- 发明人: Stefan Schulte , Ulrich Andiel
- 申请人: Stefan Schulte , Ulrich Andiel
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT AG
- 当前专利权人: Carl Zeiss SMT AG
- 当前专利权人地址: DE Oberkochen
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; B29D11/00
摘要:
A method of manufacturing an optical element having an optical surface of a non-rotationally symmetric shape is described. Measuring light is generated using an interferometer optics, wherein the interferometer optics has at least one diffractive component having a grating. The optical surface is positioned at a first position relative to the diffractive component, wherein first measuring light diffracted at the diffractive component is incident on the optical surface at plural locations thereof, and at least one first interference pattern generated from first measuring light reflected from the optical surface is detected. The optical surface is positioned at a second position relative to the at least one diffractive component, wherein second measuring light diffracted at the diffractive component is incident on the optical surface at plural locations thereof, and at least one second interference pattern generated from second measuring light reflected from the optical surface is detected.
公开/授权文献
- US07602502B2 Methods of testing and manufacturing optical elements 公开/授权日:2009-10-13