发明申请
US20090002670A1 Apparatus for the manipulation and/or adjustment of an optical element
审中-公开
用于操纵和/或调节光学元件的装置
- 专利标题: Apparatus for the manipulation and/or adjustment of an optical element
- 专利标题(中): 用于操纵和/或调节光学元件的装置
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申请号: US12221045申请日: 2008-07-30
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公开(公告)号: US20090002670A1公开(公告)日: 2009-01-01
- 发明人: Frank Melzer , Markus Weiss , Guenther Dengel , Volker Stein
- 申请人: Frank Melzer , Markus Weiss , Guenther Dengel , Volker Stein
- 申请人地址: DE Oberkochen
- 专利权人: CARL ZEISS SMT AG
- 当前专利权人: CARL ZEISS SMT AG
- 当前专利权人地址: DE Oberkochen
- 主分类号: G03B27/54
- IPC分类号: G03B27/54
摘要:
The invention relates to an apparatus for the manipulation and/or adjustment of an optical element with respect to a structure, the optical element being connected to the structure by means of a number of setting members, and the setting members having as active adjusting elements screw elements or piezoceramic elements, which in each case produce an active force along one degree of freedom and by means of which the optical element is connected to the structure in such a way that it can be set in up to six degrees of freedom.
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