发明申请
- 专利标题: Polishing apparatus and polishing method
- 专利标题(中): 抛光设备和抛光方法
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申请号: US12230839申请日: 2008-09-05
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公开(公告)号: US20090011690A1公开(公告)日: 2009-01-08
- 发明人: Tetsuji Togawa
- 申请人: Tetsuji Togawa
- 优先权: JP161393/2001 20010529
- 主分类号: B24B41/06
- IPC分类号: B24B41/06 ; B24B1/00
摘要:
A polishing apparatus comprises a first polishing table having a first polishing surface, a substrate carrier for holding a substrate and positioning the substrate so as to bring a surface of the substrate into contact with the first polishing surface, a pressing mechanism for pressing, against the first polishing surface, the surface of the substrate which has been brought into contact with the first polishing surface by the substrate carrier, a retainer ring mounted on the substrate carrier so as to surround the substrate which has been pressed against the first polishing surface by the pressing mechanism, and a retainer-ring-position-adjustment mechanism for adjustably positioning the retainer ring relative to the substrate, which has been pressed against the first polishing surface, in directions toward and away from the first polishing surface.
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