发明申请
US20090014158A1 Nano shower for chip-scale cooling 审中-公开
纳米淋浴用于芯片级冷却

Nano shower for chip-scale cooling
摘要:
A nano shower cools a chip when a coolant sprays onto the chip package from an array of electro spray nozzles. Ideally, the coolant is not conductive and otherwise not harmful to electronics. As such, perfluorocarbons are ideal coolants. Distilled water also works in certain applications. A voltage difference between the coolant and chip package causes the coolant to spray from the electro spray nozzles onto the chip package. The coolant cools the chip package by evaporating or by absorbing heat and flowing away.
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