发明申请
- 专利标题: CARBON NANOTUBE CONDUCTOR FOR TRENCH CAPACITORS
- 专利标题(中): 用于TRENCH电容器的碳纳米管导体
-
申请号: US10596022申请日: 2003-12-18
-
公开(公告)号: US20090014767A1公开(公告)日: 2009-01-15
- 发明人: Toshiharu Furukawa , Mark C. Hakey , Steven J. Holmes , David V. Horak , Charles W. Koburger, III , Larry A. Nesbit
- 申请人: Toshiharu Furukawa , Mark C. Hakey , Steven J. Holmes , David V. Horak , Charles W. Koburger, III , Larry A. Nesbit
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 国际申请: PCT/US03/40295 WO 20031218
- 主分类号: H01L27/108
- IPC分类号: H01L27/108
摘要:
A trench-type storage device includes a trench in a substrate (100), with bundles of carbon nanotubes (202) lining the trench and a trench conductor (300) filling the trench. A trench dielectric (200) may be formed between the carbon nanotubes and the sidewall of the trench. The bundles of carbon nanotubes form an open cylinder structure lining the trench. The device is formed by providing a carbon nanotube catalyst structure on the substrate and patterning the trench in the substrate; the carbon nanotubes are then grown down into the trench to line the trench with the carbon nanotube bundles, after which the trench is filled with the trench conductor.
公开/授权文献
- US07932549B2 Carbon nanotube conductor for trench capacitors 公开/授权日:2011-04-26