发明申请
- 专利标题: SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
- 专利标题(中): 半导体器件及其制造方法
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申请号: US12164635申请日: 2008-06-30
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公开(公告)号: US20090020822A1公开(公告)日: 2009-01-22
- 发明人: Kentaro NAKANISHI , Hiromasa FUJIMOTO , Takayuki YAMADA
- 申请人: Kentaro NAKANISHI , Hiromasa FUJIMOTO , Takayuki YAMADA
- 优先权: JP2007-186815 20070718
- 主分类号: H01L27/118
- IPC分类号: H01L27/118 ; H01L21/3205
摘要:
A semiconductor device includes an n-type MIS transistor and a p-type MIS transistor. The n-type MIS transistor includes a first gate electrode formed on a first active region and a first sidewall formed on the side face of the first gate electrode. The p-type MIS transistor includes a second gate electrode formed on a second active region, a second sidewall formed on the side face of the second gate electrode and strain layers formed in the second active region. The second sidewall has a smaller thickness than the first sidewall.
公开/授权文献
- US07932141B2 Semiconductor device and method for fabricating the same 公开/授权日:2011-04-26
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