发明申请
- 专利标题: WAVEFORM GENERATOR FOR MICRODEPOSITION CONTROL SYSTEM
- 专利标题(中): 用于微结构控制系统的波形发生器
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申请号: US12245893申请日: 2008-10-06
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公开(公告)号: US20090029069A1公开(公告)日: 2009-01-29
- 发明人: Charles O. EDWARDS , David ALBERTALLI , James MIDDLETON , George FELLINGHAM
- 申请人: Charles O. EDWARDS , David ALBERTALLI , James MIDDLETON , George FELLINGHAM
- 申请人地址: JP Kanagawa
- 专利权人: ULVAC, Inc.
- 当前专利权人: ULVAC, Inc.
- 当前专利权人地址: JP Kanagawa
- 主分类号: B05B5/025
- IPC分类号: B05B5/025 ; B05D1/00
摘要:
A microdeposition system and method includes a head with a plurality of nozzles. A controller generates nozzle firing commands that selectively fire the nozzles to create a desired feature pattern. Configuration memory stores voltage waveform parameters that define a voltage waveform for each of the nozzles. A digital to analog converter (DAC) sequencer communicates with the configuration memory and the controller and outputs a first voltage waveform for a first nozzle when a nozzle firing command for the first nozzle is received from the controller. A resistive ladder DAC receives the voltage waveforms from the DAC sequencer. An operational amplifier (opamp) communicates with the resistive ladder DAC and amplifies the voltage waveforms. The nozzles fire droplets when the voltage waveforms received from the opamp exceed a firing threshold of the nozzle.
公开/授权文献
- US07757632B2 Waveform generator for microdeposition control system 公开/授权日:2010-07-20
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