发明申请
US20090029499A1 Method for Manufacturing Nitride Semiconductor Light Emitting Element 审中-公开
制造氮化物半导体发光元件的方法

  • 专利标题: Method for Manufacturing Nitride Semiconductor Light Emitting Element
  • 专利标题(中): 制造氮化物半导体发光元件的方法
  • 申请号: US12086883
    申请日: 2006-12-20
  • 公开(公告)号: US20090029499A1
    公开(公告)日: 2009-01-29
  • 发明人: Ken Nakahara
  • 申请人: Ken Nakahara
  • 申请人地址: JP Kyoto
  • 专利权人: ROHM CO., LTD.
  • 当前专利权人: ROHM CO., LTD.
  • 当前专利权人地址: JP Kyoto
  • 优先权: JP2005-368157 20051221
  • 国际申请: PCT/JP2006/325401 WO 20061220
  • 主分类号: H01L33/00
  • IPC分类号: H01L33/00
Method for Manufacturing Nitride Semiconductor Light Emitting Element
摘要:
Provided is a method for manufacturing a nitride semiconductor light emitting element. In the method, when an isolation trench for chip isolation and for laser lift-off is formed, a degradation-free nitride semiconductor light emitting element with high luminance can be formed without doing any damages to a light emitting region. In an n type nitride semiconductor layer 2, a step A is formed in a region beyond an active layer 3 looked from a p side. A protective insulating film 6 covers, to a portion of the step A, side surfaces of a part of the n type nitride semiconductor layer 2, the active layer 3, a p type nitride semiconductor layer 4, and a p electrode 5 as well as a part of an upper side of the p electrode 5. With a structure in which side surfaces of a chip are covered with the protective insulating film 6, when the isolation trench for chip isolation and for laser lift-off is formed using etching, the active layer 3 and the like are not exposed to etching gas for a long time.
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