- 专利标题: Microresonator systems and methods of fabricating the same
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申请号: US11888016申请日: 2007-07-30
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公开(公告)号: US20090032805A1公开(公告)日: 2009-02-05
- 发明人: Michael Renne Ty Tan , Shih-Yuan Wang , Duncan Stewart , David A. Fattal
- 申请人: Michael Renne Ty Tan , Shih-Yuan Wang , Duncan Stewart , David A. Fattal
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L21/30
摘要:
Various embodiments of the present invention are related to microresonator systems that can be used as a laser, a modulator, and a photodetector and to methods for fabricating the microresonator systems. In one embodiment, a microresonator system comprises a substrate having a top surface layer, at least one waveguide embedded within the substrate, and a microdisk having a top layer, an intermediate layer, a bottom layer, current isolation region, and a peripheral annular region. The bottom layer of the microdisk is in electrical communication with the top surface layer of the substrate and is positioned so that at least a portion of the peripheral annular region is located above the at least one waveguide. The current isolation region is configured to occupy at least a portion of a central region of the microdisk and has a relatively lower refractive index and relatively larger bandgap than the peripheral annular region.
公开/授权文献
- US07561770B2 Microresonator systems and methods of fabricating the same 公开/授权日:2009-07-14
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