发明申请
US20090034072A1 METHOD AND APPARATUS FOR DECORRELATION OF SPATIALLY AND TEMPORALLY COHERENT LIGHT
审中-公开
用于装饰空间和时间相干光的方法和装置
- 专利标题： METHOD AND APPARATUS FOR DECORRELATION OF SPATIALLY AND TEMPORALLY COHERENT LIGHT
- 专利标题（中）： 用于装饰空间和时间相干光的方法和装置
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申请号： US11831838申请日： 2007-07-31
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公开(公告)号： US20090034072A1公开(公告)日： 2009-02-05
- 发明人: Dean Jennings , Timothy N. Thomas , Stephen Moffatt , Jiping Li , Bruce E. Adams , Samuel C. Howells
- 申请人： Dean Jennings , Timothy N. Thomas , Stephen Moffatt , Jiping Li , Bruce E. Adams , Samuel C. Howells
- 主分类号： G02B5/30
- IPC分类号： G02B5/30
摘要：
A method and apparatus for decorrelating coherent light from a light source, such as a pulsed laser, in both time and space in an effort to provide intense and uniform illumination are provided. The techniques and apparatus described herein may be incorporated into any application where intense, uniform illumination is desired, such as pulsed laser annealing, welding, ablating, and wafer stepper illuminating.