发明申请
- 专利标题: Microresonantor systems and methods of fabricating the same
- 专利标题(中): 微谐振器系统及其制造方法
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申请号: US11888015申请日: 2007-07-30
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公开(公告)号: US20090034905A1公开(公告)日: 2009-02-05
- 发明人: Michael Renne Ty Tan , Shih-Yuan Wang , Duncan Stewart , David A. Fattal
- 申请人: Michael Renne Ty Tan , Shih-Yuan Wang , Duncan Stewart , David A. Fattal
- 主分类号: G02B6/12
- IPC分类号: G02B6/12
摘要:
Various embodiments of the present invention are related to microresonator systems and to methods of fabricating the microresonator systems. In one embodiment, a microresonator system comprises a substrate having a top surface layer and at least one waveguide embedded in the substrate and positioned adjacent to the top surface layer of the substrate. The microresonator system also includes a microresonator having a top layer, an intermediate layer, a bottom layer, a peripheral region, and a peripheral coating. The bottom layer of the microresonator is attached to and in electrical communication with the top surface layer of the substrate. The microresonator is positioned so that at least a portion of the peripheral region is located above the at least one waveguide. The peripheral coating covers at least a portion of the peripheral surface and has a relatively lower index of refraction than the top, intermediate, and bottom layers of the microresonator.
公开/授权文献
- US07764852B2 Microresonantor systems and methods of fabricating the same 公开/授权日:2010-07-27
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