发明申请
- 专利标题: SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING SAME
- 专利标题(中): 半导体结构及其制造方法
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申请号: US11831005申请日: 2007-07-31
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公开(公告)号: US20090035588A1公开(公告)日: 2009-02-05
- 发明人: Wai-Kin Li , Yi-Hsiung Lin , Gerald Matusiewicz
- 申请人: Wai-Kin Li , Yi-Hsiung Lin , Gerald Matusiewicz
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: B32B15/04
- IPC分类号: B32B15/04 ; H01L21/44
摘要:
A semiconductor structure and method of manufacturing the semiconductor structure, and more particularly to a semiconductor structure having reduced metal line resistance and a method of manufacturing the same in back end of line (BEOL) processes. The method includes forming a first trench extending to a lower metal layer Mx+1 and forming a second trench remote from the first trench. The method further includes filling the first trench and the second trench with conductive material. The conductive material in the second trench forms a vertical wiring line extending orthogonally and in electrical contact with an upper wiring layer and electrically isolated from lower metal layers including the lower metal layer Mx+1. The vertical wiring line decreases a resistance of a structure.
公开/授权文献
- US07960036B2 Semiconductor structure and method of manufacturing same 公开/授权日:2011-06-14
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