发明申请
- 专利标题: PREDOPED TRANSFER GATE FOR A CMOS IMAGE SENSOR
- 专利标题(中): CMOS图像传感器的预置转移门
-
申请号: US11864713申请日: 2007-09-28
-
公开(公告)号: US20090035886A1公开(公告)日: 2009-02-05
- 发明人: John Ellis-Monaghan , Jeffrey B. Johnson , Alain Loiseau
- 申请人: John Ellis-Monaghan , Jeffrey B. Johnson , Alain Loiseau
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A novel CMOS image sensor Active Pixel Sensor (APS) cell structure and method of manufacture. Particularly, a CMOS image sensor APS cell having a predoped transfer gate is formed that avoids the variations of Vt as a result of subsequent manufacturing steps. According to the preferred embodiment of the invention, the CMOS image sensor APS cell structure includes a doped p-type pinning layer and an n-type doped gate. There is additionally provided a method of forming the CMOS image sensor APS cell having a predoped transfer gate and a doped pinning layer. The predoped transfer gate prevents part of the gate from becoming p-type doped.
公开/授权文献
- US07888156B2 Predoped transfer gate for a CMOS image sensor 公开/授权日:2011-02-15
信息查询
IPC分类: