发明申请
US20090035886A1 PREDOPED TRANSFER GATE FOR A CMOS IMAGE SENSOR 有权
CMOS图像传感器的预置转移门

PREDOPED TRANSFER GATE FOR A CMOS IMAGE SENSOR
摘要:
A novel CMOS image sensor Active Pixel Sensor (APS) cell structure and method of manufacture. Particularly, a CMOS image sensor APS cell having a predoped transfer gate is formed that avoids the variations of Vt as a result of subsequent manufacturing steps. According to the preferred embodiment of the invention, the CMOS image sensor APS cell structure includes a doped p-type pinning layer and an n-type doped gate. There is additionally provided a method of forming the CMOS image sensor APS cell having a predoped transfer gate and a doped pinning layer. The predoped transfer gate prevents part of the gate from becoming p-type doped.
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