发明申请
- 专利标题: Sensor-type package and method for fabricating the same
- 专利标题(中): 传感器型封装及其制造方法
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申请号: US12221725申请日: 2008-08-06
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公开(公告)号: US20090039527A1公开(公告)日: 2009-02-12
- 发明人: Chang-Yueh Chan , Chien-Ping Huang , Tse-Wen Chang , Chin-Huang Chang , Chih-Ming Huang
- 申请人: Chang-Yueh Chan , Chien-Ping Huang , Tse-Wen Chang , Chin-Huang Chang , Chih-Ming Huang
- 申请人地址: TW Taichung
- 专利权人: Siliconware Precision Industries Co., Ltd.
- 当前专利权人: Siliconware Precision Industries Co., Ltd.
- 当前专利权人地址: TW Taichung
- 优先权: TW096128799 20070806
- 主分类号: H01L23/52
- IPC分类号: H01L23/52 ; H01L21/00
摘要:
A sensor-type package and a method for fabricating the same are provided. A wafer having a plurality of semiconductor chips is provided, wherein a plurality of holes are formed on a first surface of each of the semiconductor chips, and a plurality of metallic pillars formed in the holes and a plurality of bond pads connected to the metallic pillars form through silicon vias (TSVs). A groove is formed on a second surface of each of the semiconductor chips to expose the metallic pillars. A plurality of sensor chips having TSVs are stacked in the grooves of the semiconductor chips and electrically connected to the exposed metallic pillars. A transparent cover is mounted onto the second surfaces of the semiconductor chips to cover the grooves. A plurality of conductive components are implanted on the bond pads of the semiconductor chips. The wafer is cut along borders among the semiconductor chips.
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