发明申请
- 专利标题： ARRAY OF SPATIAL LIGHT MODULATORS AN DMETHOD OF PRODUCTION OF A SPATIAL LIGHT MODULATOR DEVICE
- 专利标题（中）： 空间光调制器阵列空调光调制器的制造方法
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申请号： US11718405申请日： 2005-11-03
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公开(公告)号： US20090040595A1公开(公告)日： 2009-02-12
- 发明人: Marc Andre De Samber , Michiel De Jong , Antonius Johannes Maria Nellissen , Nicolaas Johannes Anthonius Van Veen
- 申请人： Marc Andre De Samber , Michiel De Jong , Antonius Johannes Maria Nellissen , Nicolaas Johannes Anthonius Van Veen
- 申请人地址： NL EINDHOVEN
- 专利权人： KONINKLIJKE PHILIPS ELECTRONICS, N.V.
- 当前专利权人： KONINKLIJKE PHILIPS ELECTRONICS, N.V.
- 当前专利权人地址： NL EINDHOVEN
- 优先权： EP04105607.8 20041109
- 国际申请： PCT/IB05/53588 WO 20051103
- 主分类号： G02F1/00
- IPC分类号： G02F1/00 ; B23P11/00
摘要：
For the production of a SLM device, one mounts a spatial light modulator (SLM) (2) on a substrate (3) of the same material as the main material of the SLM (2) to be juxtaposed with the substrate (3). Particularly, silicon based SLMs (2) are mounted on a silicon substrate (3). This leads to arrays of SLMs (2) that maintain a high accuracy with respect to position of the SLMs (2) and planarity. To further improve the planarity, it is preferred to mount the SLMs (2) on the substrate (3) by soldering, using the self-aligning effect of solder connections (20).