发明申请
US20090045552A1 Positive resist composition for recording medium master, and method of producing recording medium master and method of producing stamper using the same
审中-公开
用于记录介质母版的正性抗蚀剂组合物,以及制造记录介质母版的方法和使用其的压模的制造方法
- 专利标题: Positive resist composition for recording medium master, and method of producing recording medium master and method of producing stamper using the same
- 专利标题(中): 用于记录介质母版的正性抗蚀剂组合物,以及制造记录介质母版的方法和使用其的压模的制造方法
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申请号: US11918739申请日: 2006-04-18
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公开(公告)号: US20090045552A1公开(公告)日: 2009-02-19
- 发明人: Genji Imai , Daisuke Kojima
- 申请人: Genji Imai , Daisuke Kojima
- 优先权: JP2005-122731 20050420
- 国际申请: PCT/JP2006/308115 WO 20060418
- 主分类号: H05B6/02
- IPC分类号: H05B6/02 ; G03C1/73 ; G03F7/20
摘要:
Provided are a positive resist composition for recording medium master showing excellent plating resistance and adhesion to a base plate such as glass or the like characterized by containing a vinyl polymer which has a monomer unit having an alkali-soluble group blocked by an alkyl vinyl ether, and a method of producing a recording medium master or stamper using this positive resist composition.
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