发明申请
- 专利标题： SIMULATION METHOD AND SIMULATION PROGRAM
- 专利标题（中）： 模拟方法和仿真程序
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申请号： US12192197申请日： 2008-08-15
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公开(公告)号： US20090048813A1公开(公告)日： 2009-02-19
- 发明人: Takashi Ichikawa , Naoki Tamaoki , Toshiro Takase
- 申请人： Takashi Ichikawa , Naoki Tamaoki , Toshiro Takase
- 优先权： JP2007-212419 20070816
- 主分类号： G06F17/10
- IPC分类号： G06F17/10
摘要：
A simulation method is configured to simulate a feature profile of a material surface. The simulation method includes using an algorithm of repeating a step of calculating a surface growth rate and a step of skipping the calculation of the surface growth rate. The surface growth rate is calculated in the step of skipping the calculation of the algorithm if the material surface traverses a material interface.
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