发明申请
US20090050776A1 APPARATUS FOR MANIPULATION OF AN OPTICAL ELEMENT 审中-公开
用于操纵光学元件的装置

APPARATUS FOR MANIPULATION OF AN OPTICAL ELEMENT
摘要:
The invention relates to an apparatus for manipulation of an optical element in up to six degrees of freedom with respect to a structure via at least three actuator devices. The actuator devices each have at least two force-controlled actuators, which each produce an effective force along one degree of freedom, with linking points of the actuator devices acting directly on the optical element.
信息查询
0/0