发明申请
- 专利标题: APPARATUS FOR MANIPULATION OF AN OPTICAL ELEMENT
- 专利标题(中): 用于操纵光学元件的装置
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申请号: US12246992申请日: 2008-10-07
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公开(公告)号: US20090050776A1公开(公告)日: 2009-02-26
- 发明人: Michael Muehlbeyer , Johannes Lippert
- 申请人: Michael Muehlbeyer , Johannes Lippert
- 申请人地址: DE Oberkochen
- 专利权人: CARL ZEISS SMT AG
- 当前专利权人: CARL ZEISS SMT AG
- 当前专利权人地址: DE Oberkochen
- 主分类号: A47G1/24
- IPC分类号: A47G1/24
摘要:
The invention relates to an apparatus for manipulation of an optical element in up to six degrees of freedom with respect to a structure via at least three actuator devices. The actuator devices each have at least two force-controlled actuators, which each produce an effective force along one degree of freedom, with linking points of the actuator devices acting directly on the optical element.
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