发明申请
- 专利标题: Phase-change random access memory and method of manufacturing the same
- 专利标题(中): 相变随机存取存储器及其制造方法
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申请号: US12073499申请日: 2008-03-06
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公开(公告)号: US20090050869A1公开(公告)日: 2009-02-26
- 发明人: Cheol-kyu Kim , Yoon-ho Khang , Tae-yon Lee
- 申请人: Cheol-kyu Kim , Yoon-ho Khang , Tae-yon Lee
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 优先权: KR10-2007-0084032 20070821
- 主分类号: H01L45/00
- IPC分类号: H01L45/00
摘要:
Provided is a phase-change random access memory (PRAM). The PRAM includes a bottom electrode, a bottom electrode contact layer, which is formed on one area of the bottom electrode, and an insulating layer, which is formed on a side of the bottom electrode contact layer, a phase-change layer, which is formed on the bottom electrode contact layer and the insulating layer and is formed of a phase-change material having a crystallization temperature between 100° C. and 150° C., and a top electrode, which is formed on the phase-change layer.
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