发明申请
- 专利标题: Coating-type underlayer coating forming composition for lithography containing naphthalene resin derivative
- 专利标题(中): 含有萘树脂衍生物的光刻用涂布型下层涂料组合物
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申请号: US11921790申请日: 2006-05-24
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公开(公告)号: US20090053647A1公开(公告)日: 2009-02-26
- 发明人: Tomoyuki Enomoto , Takahiro Kishioka , Takahiro Sakaguchi
- 申请人: Tomoyuki Enomoto , Takahiro Kishioka , Takahiro Sakaguchi
- 申请人地址: JP TOKYO
- 专利权人: NISSAN CHEMICAL INDUSTRIES, LTD.
- 当前专利权人: NISSAN CHEMICAL INDUSTRIES, LTD.
- 当前专利权人地址: JP TOKYO
- 优先权: JP2005-170758 20050610
- 国际申请: PCT/JP2006/310358 WO 20060524
- 主分类号: G03F7/09
- IPC分类号: G03F7/09 ; C08G63/66 ; G03F7/20 ; C08G63/06
摘要:
[Object] To provide a coating-type underlayer coating forming composition containing a naphthalene resin derivative. [Means for Solving Problems] A coating-type underlayer coating forming composition for lithography comprising a compound of formula (1): wherein A is an organic group having an aromatic group, R1 is hydroxy group, an alkyl group, an alkoxy group, a halogen group, a thiol group, an amino group or an amide group, m1 is the number of A substituted on the naphthalene ring and is an integer of 1 to 6, m2 is the number of R1 substituted on the naphthalene ring and is an integer of 0 to 5, a sum of m1 and m2 (m1+m2) is an integer of 1 to 6, in cases where the sum is an integer other than 6, the reminder is hydrogen atom, and n is the number of repeating units ranging from 2 to 7000.
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