A hydrogenation reaction vessel makes STC-containing substance react with hydrogen to convert the substance into TCS. A low boils removal column separates a chlorosilane distillate discharged from a hydrogenation reaction vessel into TCS and a mixture distillate containing hyper-hydrogenated chlorosilane, and circulates the mixture distillate containing hyper-hydrogenated chlorosilane to the hydrogenation reaction vessel. The mixture distillate containing the hyper-hydrogenated chlorosilane separated in the low boils removal column is circulatingly supplied to the hydrogenation reaction vessel. Accordingly, low boils by-product conventionally wasted is circulated and recycled in the process, which results in enhancing a yield of TCS production.