Invention Application
US20090057725A1 Image Sensor and Manufacturing Method Thereof 失效
图像传感器及其制造方法

  • Patent Title: Image Sensor and Manufacturing Method Thereof
  • Patent Title (中): 图像传感器及其制造方法
  • Application No.: US12199762
    Application Date: 2008-08-27
  • Publication No.: US20090057725A1
    Publication Date: 2009-03-05
  • Inventor: Tae Gyu KIM
  • Applicant: Tae Gyu KIM
  • Priority: KR10-2007-0088257 20070831
  • Main IPC: H01L31/00
  • IPC: H01L31/00 H01L21/00
Image Sensor and Manufacturing Method Thereof
Abstract:
Disclosed is an image sensor. The image sensor includes a semiconductor substrate including a lower interconnection, a plurality of upper interconnection sections protruding upward from the semiconductor substrate, a first trench disposed between the upper interconnection sections such that the upper interconnection sections are spaced apart from each other, a bottom electrode disposed on an outer peripheral surfaces of the upper interconnection sections, a first conductive layer disposed on an outer peripheral surface of the bottom electrode, an intrinsic layer disposed on the semiconductor substrate including the first conductive layer and the first trench, and having a second trench on the first trench, a second conductive layer disposed on the intrinsic layer and having a third trench on the second trench, a light blocking part disposed in the third trench, and a top electrode disposed on the light blocking part and the second conductive layer.
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