发明申请
- 专利标题: Laser system
- 专利标题(中): 激光系统
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申请号: US11980172申请日: 2007-10-30
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公开(公告)号: US20090067468A1公开(公告)日: 2009-03-12
- 发明人: Daniel J.W. Brown , William N. Partlo , Richard L. Sandstrom
- 申请人: Daniel J.W. Brown , William N. Partlo , Richard L. Sandstrom
- 申请人地址: US CA San Diego
- 专利权人: Cymer, Inc.
- 当前专利权人: Cymer, Inc.
- 当前专利权人地址: US CA San Diego
- 主分类号: H01S3/22
- IPC分类号: H01S3/22
摘要:
A method/apparatus may comprise a laser light source which may comprise a solid state seed laser system producing a seed laser output having a nominal center wavelength at a pulse repetition rate; a first and a second gas discharge laser amplifier gain medium each operating at a pulse repetition rate less than that of the seed laser system; a beam divider providing each of the respective first and second amplifier gain mediums with seed laser output pulses; a frequency converter modifying the nominal center wavelength of the output of the seed laser to essentially the nominal center wavelength of the amplifier gain medium; a beam combiner combining the outputs of the respective amplifier gain mediums to provide a light source output having the pulse repetition rate of the seed laser; a coherence buster operating on either or both of the output of the seed laser or amplifier gain mediums.
公开/授权文献
- US07920616B2 Laser system 公开/授权日:2011-04-05
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