发明申请
- 专利标题: OFF-AXIS OBJECTIVES WITH ROTATABLE OPTICAL ELEMENT
- 专利标题(中): 具有可旋转光学元件的偏轴目标
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申请号: US12206550申请日: 2008-09-08
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公开(公告)号: US20090073412A1公开(公告)日: 2009-03-19
- 发明人: Alexandra PAZIDIS , Aksel Goehnermeier
- 申请人: Alexandra PAZIDIS , Aksel Goehnermeier
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT AG
- 当前专利权人: Carl Zeiss SMT AG
- 当前专利权人地址: DE Oberkochen
- 优先权: DE102006010337.8 20060307
- 主分类号: G03B27/54
- IPC分类号: G03B27/54
摘要:
An objective and a method for operating an objective, in particular a projection objective or an illumination objective for microlithography for imaging a reticle onto a wafer, with a plurality of optical elements that are arranged along a ray path, wherein at least one optical element of a first kind (1) is provided, which is irradiated only partially by a ray bundle, wherein the one or more optical element(s) of the first kind are rotatably mounted or positionable about the optical axis or an axis parallel thereto, wherein, for each optical element of the first kind at least two mounting positions are provided, and wherein the rotation angle between the two mounting positions is defined by the surface (7) irradiated by the ray bundle such that, in the various mounting positions, the surfaces irradiated by the ray path do not overlap.
公开/授权文献
- US08339575B2 Off-axis objectives with rotatable optical element 公开/授权日:2012-12-25
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