Invention Application
- Patent Title: Ultraviolet sensor
- Patent Title (中): 紫外线传感器
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Application No.: US12230976Application Date: 2008-09-09
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Publication No.: US20090078880A1Publication Date: 2009-03-26
- Inventor: Masao Okihara
- Applicant: Masao Okihara
- Applicant Address: JP Tokyo
- Assignee: OKI ELECTRIC INDUSTRY CO., LTD.
- Current Assignee: OKI ELECTRIC INDUSTRY CO., LTD.
- Current Assignee Address: JP Tokyo
- Priority: JP2007-246207 20070921
- Main IPC: G01J1/42
- IPC: G01J1/42

Abstract:
An ultraviolet sensor has an ultraviolet detection diode having a depletion region 18 formed in an Si layer 16 on an insulating layer 14, an interlayer insulating film 20 formed on the ultraviolet detection diode, and a wiring 24 formed on the interlayer insulating film 20. An incident angle θ (°) of an incident light entering into the depletion region 18 and a film thickness Tsi (nm) of the depletion region 18 satisfy the following formula (1), which is also shown in FIG. 14. TSi≦TSi/sin θ≦100 (Formula 1)
Public/Granted literature
- US08217361B2 Ultraviolet sensor Public/Granted day:2012-07-10
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