发明申请
- 专利标题: CHEMICAL SENSOR
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申请号: US11353378申请日: 2006-02-14
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公开(公告)号: US20090084162A1公开(公告)日: 2009-04-02
- 发明人: Isabelle Besnard , Tobias Vossmeyer , Akio Yasuda , Marko Burghard , Ulrich Schlecht
- 申请人: Isabelle Besnard , Tobias Vossmeyer , Akio Yasuda , Marko Burghard , Ulrich Schlecht
- 申请人地址: DE BERLIN DE MUENCHEN
- 专利权人: SONY INTERNATIONAL (EUROPE) GMBH,MAX-PLANCK-GESELLSCHAFT ZUR FOERDERUNG DER WISSENSCHAFTEN E. V.
- 当前专利权人: SONY INTERNATIONAL (EUROPE) GMBH,MAX-PLANCK-GESELLSCHAFT ZUR FOERDERUNG DER WISSENSCHAFTEN E. V.
- 当前专利权人地址: DE BERLIN DE MUENCHEN
- 优先权: EP01128064.1 20011126
- 主分类号: G01N33/00
- IPC分类号: G01N33/00 ; G01N33/02 ; H01L21/18 ; G01N33/48
摘要:
The application relates to a chemical sensor device comprising a substrate (1), a sensor medium (3) formed on the substrate, the sensor medium comprising one-dimensional nanoparticles, wherein the one-dimensional nanoparticles essentially consist of a semiconducting AxBy compound, e.g. V2O5 and detection means (2) for detecting a change of a physical property of the sensor medium e.g. conductivity. The porosity of the sensor medium supports a fast access of the analyte to the sensing material and therefore a fast response of the sensor. The selectivity and sensitivity of the sensor can be tailored by doping the one-dimensional nanoscale material with different dopants or by varying the dopant concentration. Sensitivity of the sensor device to an analyte, preferably an amine, can be increased by increasing relative humidity of the sample to at least 5%.
公开/授权文献
- US07531136B2 Chemical sensor 公开/授权日:2009-05-12
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