发明申请
- 专利标题: LATERAL DIFFUSION METAL-OXIDE-SEMICONDUCTOR STRUCTURE
- 专利标题(中): 侧向扩散金属氧化物半导体结构
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申请号: US11864278申请日: 2007-09-28
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公开(公告)号: US20090085112A1公开(公告)日: 2009-04-02
- 发明人: Dah-Chuen Ho , Chien-Shao Tang , Zhe-Yi Wang , Yu-Chang Jong
- 申请人: Dah-Chuen Ho , Chien-Shao Tang , Zhe-Yi Wang , Yu-Chang Jong
- 申请人地址: TW Hsinchu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人地址: TW Hsinchu
- 主分类号: H01L29/78
- IPC分类号: H01L29/78
摘要:
A lateral diffusion metal-oxide-semiconductor (LDMOS) structure comprises a gate, a source, a drain and a shallow trench isolation. The shallow trench isolation is formed between the drain and the gate to withstand high voltages, applied to the drain, and is associated with the semiconductor substrate to form a recess. As such, the surface of the shallow trench isolation is lower than the surface of the semiconductor substrate. Optionally, the surface of the shallow trench isolation is lower than the surface of the semiconductor substrate by 300-1500 angstroms.
公开/授权文献
- US07608889B2 Lateral diffusion metal-oxide-semiconductor structure 公开/授权日:2009-10-27
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