发明申请
- 专利标题: Layout Quality Gauge for Integrated Circuit Design
- 专利标题(中): 集成电路设计布局质量计
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申请号: US11865252申请日: 2007-10-01
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公开(公告)号: US20090089726A1公开(公告)日: 2009-04-02
- 发明人: Fook-Luen Heng , Mark A. Lavin , Jin-Fuw Lee , Thomas Ludwig , Rama Nand Singh , Fanchieh Yee
- 申请人: Fook-Luen Heng , Mark A. Lavin , Jin-Fuw Lee , Thomas Ludwig , Rama Nand Singh , Fanchieh Yee
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
A method for layout design includes steps or acts of: receiving a layout for design of an integrated circuit chip; designing mask shapes for the layout; transmitting the mask shapes to a litho simulator for generating wafer shapes; receiving the wafer shapes; calculating electrically equivalent gate lengths for the wafer shapes; analyzing the gate lengths to check for conformity against a threshold value, wherein the threshold value represents a desired value of electrically equivalent gate lengths; placing markers on the layout at those locations where the gate length violates the threshold value; and generating a histogram of gate lengths for comparing layouts for electrically equivalent gate lengths for layout quality.
公开/授权文献
- US08020120B2 Layout quality gauge for integrated circuit design 公开/授权日:2011-09-13
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