Invention Application
- Patent Title: Erbium Sputtering Target and Manufacturing Method
- Patent Title (中): 铒溅射靶和制造方法
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Application No.: US12137856Application Date: 2008-06-12
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Publication No.: US20090090621A1Publication Date: 2009-04-09
- Inventor: Shiro Tsukamoto
- Applicant: Shiro Tsukamoto
- Applicant Address: JP Tokyo
- Assignee: NIPPON MINING & METALS CO., LTD.
- Current Assignee: NIPPON MINING & METALS CO., LTD.
- Current Assignee Address: JP Tokyo
- Priority: JP2007-164007 20070621
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C22F1/16

Abstract:
Technology for efficiently and stably providing an erbium sputtering target with low generation of particles during sputtering and capable of achieving favorable uniformity of the sputtered film, as well as a method for manufacturing such an erbium sputtering target is provided. More specifically, an erbium sputtering target is manufactured by forging and heat treatment, wherein the target purity is 3N5 or higher, and the average grain size of crystals observed in the target structure is 1 to 20 mm. The method of manufacturing an erbium sputtering target includes the steps of subjecting a vacuum-cast ingot having a purity of 3N5 or higher to constant temperature forging within a temperature range of 1100 to 1200° C., subsequently subjecting the forged target material to heat treatment at a temperature of 800 to 1200° C., adjusting the target purity to be 3N5 or higher and the average grain size of the target structure to be 1 to 20 mm, and cutting this out to obtain a target.
Information query
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