发明申请
US20090090883A1 CHAMBER ISOLATION VALVE RF GROUNDING 有权
室隔离阀射频接地

CHAMBER ISOLATION VALVE RF GROUNDING
摘要:
Embodiments described herein provide a method and apparatus for grounding a chamber isolation valve. In one embodiment, a grounded chamber isolation valve for a plasma processing system is described. The chamber isolation valve includes a door and a bracing member movably attached to and opposing the door, and at least one electrically conductive member in electrical communication with the door, the at least one electrically conductive member comprising one or more reaction bumpers disposed on the bracing member that are adapted to contact at least one grounded component of the plasma processing system when the door is in the closed position.
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