发明申请
- 专利标题: COMPONENT FABRICATION USING THERMAL RESIST MATERIALS
- 专利标题(中): 使用耐热材料的组件制造
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申请号: US11869008申请日: 2007-10-09
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公开(公告)号: US20090092928A1公开(公告)日: 2009-04-09
- 发明人: Mitchell S. Burberry , Lee W. Tutt
- 申请人: Mitchell S. Burberry , Lee W. Tutt
- 主分类号: G03C5/00
- IPC分类号: G03C5/00
摘要:
A method for producing a patterned material for electronic or photonic circuits, comprising the steps of:p) providing a substrate;q) coating the substrate with a polymer layer;r) coating a thermal resist solution over the polymer layer to form a thermal resist layer, wherein the polymer layer is substantially immiscible in the thermal resist solution;s) exposing predetermined areas of the thermal resist layer, corresponding to a desired image pattern, using infrared light;t) removing portions of the thermal resist layer corresponding to a desired image pattern, using a developer;u) removing the polymer layer where the thermal resist layer has been previously removed and undercutting a portion of the remaining thermal resist layer by an etching process;v) depositing a material using a substantially anisotropic process; and removing the remaining thermal resist layer and any overlying material with a solvent for the polymer or thermal resist layers leaving the material in a desired pattern.
公开/授权文献
- US07989146B2 Component fabrication using thermal resist materials 公开/授权日:2011-08-02
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