发明申请
- 专利标题： SELF-ASSEMBLED SIDEWALL SPACER
- 专利标题（中）： 自组装的平台间隔
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申请号： US11869178申请日： 2007-10-09
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公开(公告)号： US20090093133A1公开(公告)日： 2009-04-09
- 发明人: Bruce B. Doris , Carl J. Radens
- 申请人： Bruce B. Doris , Carl J. Radens
- 申请人地址： US NY Armonk
- 专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址： US NY Armonk
- 主分类号： H01L21/47
- IPC分类号： H01L21/47
摘要：
A semiconductor structure is provided that includes a spacer directly abutting a topographic edge of at least one patterned material layer. The spacer is a non-removable polymeric block component of a self-assembled block copolymer. A method of forming such a semiconductor structure including the inventive spacer is also provided that utilizes self-assembled block copolymer technology.
公开/授权文献
- US08105960B2 Self-assembled sidewall spacer 公开/授权日：2012-01-31
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