Invention Application
- Patent Title: MICRO-ELECTROMECHANICAL MICROSHUTTER ARRAY
- Patent Title (中): 微电子显微镜阵列
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Application No.: US11870465Application Date: 2007-10-11
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Publication No.: US20090097095A1Publication Date: 2009-04-16
- Inventor: John N. Border , Herbert James Erhardt , J. Kelly Lee , Marek W. Kowarz
- Applicant: John N. Border , Herbert James Erhardt , J. Kelly Lee , Marek W. Kowarz
- Main IPC: G02F1/03
- IPC: G02F1/03

Abstract:
A microshutter array has a frame having a light transmissive portion. Linear microshutter elements extend across the light transmissive portion and in parallel to each other. Each microshutter element has a flat blade extended in a length direction and first and second torsion arms extending outwards from each side of the blade in the length direction, the blade extending across the light transmissive portion. There is at least one electrode associated with each linear microshutter element and extended in the length direction parallel to the microshutter element.
Public/Granted literature
- US07684101B2 Micro-electromechanical microshutter array Public/Granted day:2010-03-23
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