发明申请
- 专利标题: Deposition Apparatus With Guide Roller For Long Superconducting Tape
- 专利标题(中): 用于超导磁带的导辊沉积装置
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申请号: US12177853申请日: 2008-07-22
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公开(公告)号: US20090107395A1公开(公告)日: 2009-04-30
- 发明人: Hong Soo Ha , Sang Soo Oh , Dong Woo Ha , Kyu Jung Song , Rock Kil Ko , Ho Sup Kim
- 申请人: Hong Soo Ha , Sang Soo Oh , Dong Woo Ha , Kyu Jung Song , Rock Kil Ko , Ho Sup Kim
- 申请人地址: KR Changwon-si
- 专利权人: Korea Electrotechnology Research Institute
- 当前专利权人: Korea Electrotechnology Research Institute
- 当前专利权人地址: KR Changwon-si
- 优先权: KR10-2007-0110241 20071031
- 主分类号: C23C14/24
- IPC分类号: C23C14/24
摘要:
Disclosed herein is a deposition apparatus with a guide roller for a long superconducting tape. The deposition apparatus has a supply reel which is provided in a vacuum chamber and rotated to supply the tape, a feed and deposition unit which is spaced apart from the supply reel and vacuum deposits a superconducting layer on the tape while feeding the tape, and a collection reel which is spaced apart from the feed and deposition unit and is rotated to collect the vacuum-deposited tape. The feed and deposition unit includes a drum which is rotated to wind the tape on a predetermined portion of an outer circumference of the drum several times, thus feeding the tape, and a guide roller which is spaced apart from the drum, includes a plurality of rollers each having on an outer circumference thereof grooves and protrusions at regular intervals, and is inclined at a predetermined angle with respect to a rotating shaft of the drum by a sum of a width of the tape and a thickness of each of the protrusions, with the tape passing over an outer circumference of the guide roller. The invention deposits a superconducting layer while maintaining constant tension when the tape is thermally deposited, thus preventing the tape from being deformed because of the difference in the thermal expansion and contraction of the tape resulting from non-uniform tension.