发明申请
- 专利标题： Corrosion-resistant multilayer ceramic member
- 专利标题（中）： 耐腐蚀多层陶瓷构件
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申请号： US12285108申请日： 2008-09-29
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公开(公告)号： US20090107635A1公开(公告)日： 2009-04-30
- 发明人: Shoji Kano , Waichi Yamamura , Yoshihiro Kubota
- 申请人： Shoji Kano , Waichi Yamamura , Yoshihiro Kubota
- 申请人地址： JP TOKYO
- 专利权人： SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人： SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人地址： JP TOKYO
- 优先权： JP2007-278774 20071026
- 主分类号： H01L21/302
- IPC分类号： H01L21/302 ; H01L21/30
摘要：
The present invention relates to a corrosion-resistant multilayer ceramic member consisting at least of: a ceramic support substrate; an electrode layer formed on the ceramic support substrate; a power-supply member connected to the electrode layer; an insulating protection layer formed on the ceramic support substrate to cover the electrode layer; and a ceramic protection substrate of which at least a part is provided on the insulating protection layer. Thereby, there is provided a long-life corrosion-resistant multilayer ceramic member excellent in corrosion resistance even when exposed to a corrosive gas.
公开/授权文献
- US08829397B2 Corrosion-resistant multilayer ceramic member 公开/授权日：2014-09-09
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